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Semiconductor Processing Solutions

Gas Abatement


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The CLEAN-PROTECT is designed to absorb toxic or otherwise hazardous gases during an emergency gas release incident.

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The PRIMELINE series represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems.

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The CLEANSORB LABLINE features a small absorber column housed in a compact, air-extracted cabinet.

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For small-scale research work, stand-alone absorber columns can be used to remove remaining gas concentrations downstream of the experimental chamber.

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Exhaust gas treatment by CLEANSORB FABLINE FX is the latest version of the series that has proven its reliability in thousands of CS CLEAN SOLUTIONS installations worldwide.

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Before a new gas cylinder is put on-line within a gas supply cabinet, process gas remaining from the previous cylinder must first be removed – both for reasons of safety and to ensure integrity of the fresh gas supply.

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The PCS TROPO and PCS STRATO atmospheric plasma conversion systems are high performance plasma sources, developed to destroy perfluorinated compounds such as CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch and related processes.

Other Gas Abatement Products:

  • CLEANSORB® SC- and DC-Series