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Contamination Monitoring & Validation

Particle Monitoring In Micro Electronics


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The AirSentry II airborne molecular contamination (AMC) ion mobility spectrometers detect and alert users to small concentrations and changes in airborne levels of chlorides, acids, amines, and ammonia-containing species.

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Advanced Aerosol Manifold for sequentially monitoring aerosol contamination at multiple cleanroom locations with a fixed airborne particle counter.

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The CLS-700 T corrosive liquid particle sampler from Particle Measuring Systems (PMS) is a compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels.

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Handheld Particle Counter: Handilaz® Mini II. Sensitivity: 0.2 - 10 µm - Effective Troubleshooting from a handheld particle counter.

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High-technology manufacturing processes often require high-purity gases. The HPGP 101-C Ultra High Purity Gas Particle Counter provides reliable in-line contamination monitoring for process gases at line pressure up to 150 psig .

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The HSLIS liquid Particle Counter provides continuous, real-time particle monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF) and is included in Particle Measuring System’ (PMS) complete line of liquid particle counters.

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Lasair III 110 mobile particle counter: 0.1 micron particle counter can be used as a mobile counter to localize the source of particles, making this an ideal tool for ISO-14644-1 clean room certification for class 1 and 2 cleanrooms.

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The LiQuilaz® II liquid particle counter Series comes in a range of sizing sensitivities to meet your volumetric liquid particle counting needs.

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Condensation Particle Counter CPC NanoAir™ 10. The NanoAir™ 10 is a purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces. Enables detection of yield-impacting particle excursions within process tools, critical cleanroom areas, and pressurized high-purity gas delivery.

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The SLS Family of instruments are ideal for applications where precise, small-volume particle batch sampling is required, and where the sampler device cannot contribute contamination to the chemical sample.

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The Ultra DI line of DI water particle counters from Particle Measuring Systems (PMS®) provides groundbreaking capabilities for monitoring the most demanding de-ionized and ultrapure water systems.